Introduction

• System recycles waste developer that contains photo resists using Nano-Filter to reuse in the manufacturing process.

Application

• DPF (Developer Purification & Filtration System)

Introduction

• System samples chemicals from the Developer to maintain consistent levels in the concentrations of Alkali, Resist, and Carbonate.

Application

• DDS-11

Management Category

• Alkali Concentration : Conductivity measurement
• Dissolution Resisting Substance : Absorbance measurement
• Carbonate Concentration : Refractive Index measurement